To monitor a specific file or directory, set up a filter in Process Monitor as follows:
Immediately press the magnifying glass toolbar button or disable "Capture Events" from the File menu (Ctrl-E)
Press the "Clear" toolbar button or "Clear Display" from the Edit menu (Ctrl-X)
To narrow the types of events to be captured click each of the rightmost toolbar buttons (except for the file cabinet) so they appear flush with the toolbar. Leave the file cabinet button pressed so that Process Monitor will show file system activity.
Select "Filter..." from the Filter menu
Press the Reset button if it is enabled
In the filter fields, select "Path" "is" and then type into the entry field the local disk or UNC path name for the directory you want to monitor (e.g. c:\data or \\myserver\mydir). Select "Include", press Add, Apply, OK.
Enable "Capture Events" (Ctrl-E) to watch the I/O activity in the specified directory.