No but that's a Windows System folder. Nothing to be done about that except buying larger disks (I'm assuming that your server C drive is a RAID1 array)
The 800 pound-gorilla in the QlikView area of your C-drive are probably the QDS log folders. Navigate to C:\ProgramData\QlikTech\DistributionService\1\Log\ and open the Properties dialog to check the size of all subdirectories and items. If this folder seems extremely bulky to you, consider moving the Distribution Application Data folder (including logs) to another drive.
See QMC->System->Setup->Distribution Services->Your Distribution Service->General->Settings for QDS->Application Data Folder.
Thanks for the suggestion. Will try this solution in case it happens again. The main reason for filling up of C - drive in my case was as mentioned in my original post i.e., because of ScanFile folder. This folder was removed and rescan was initiated which solved the issue and freed up lot of space.